The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2004
Filed:
Aug. 31, 2000
Applicant:
Inventors:
Laura Wills Mirkarimi, Sunol, CA (US);
Stephen R. Gilbert, San Francisco, CA (US);
Guoqiang Xing, Plano, TX (US);
Scott Summerfelt, Cupertino, CA (US);
Tomoyuki Sakoda, San Jose, CA (US);
Ted Moise, Los Altos, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1306 ; H01L 2/18239 ;
U.S. Cl.
CPC ...
H01L 2/1306 ; H01L 2/18239 ;
Abstract
The present disclosure relates to a post-etch cleaning treatment for a semiconductor device such as a FeRAM. The treatment comprises providing an etchant comprising both a fluorine compound and a chlorine compound, and applying the etchant to the semiconductor device in a wet cleaning process.