The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2004
Filed:
May. 17, 2000
United Microelectronics Corp., Hsin Chu, TW;
Abstract
The proposed invention is related to a method for forming a gate with metal silicide. In short, the proposed method comprises the following steps: providing a substrate; forming a first dielectric layer on the substrate; forming a polysilicon layer on the first dielectric layer; forming a metal silicide layer on the polysilicon layer; forming a second dielectric layer on the metal silicide layer; etching the second dielectric layer, the metal silicide layer, the polysilicon layer and the first dielectric layer to form a gate; performing a thermal nitridation process to form a metal nitride layer on the sidewall of the metal silicide layer; and performing a thermal oxidation process to eliminate edge defects.