The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Jun. 13, 2002
Stephen F. Horne, Chelmsford, MA (US);
Philip J. Maiorana, Cambridge, MA (US);
Santhi E. Mathew, Londonderry, NH (US);
Leonid Mindlin, South Natick, MA (US);
Claudia J. Quigley, Lexington, MA (US);
Eric R. Taranto, Yucapia, CA (US);
Donald K. Smith, Belmont, MA (US);
MKS Instruments, Inc., Andover, MA (US);
Abstract
A compensated sensor includes a sensor, a relatively fast feedthrough path, and a relatively slow compensation path. The relatively fast feedthrough path includes a summer and output circuitry, such as a summing amplifier. The relatively slow compensation path includes circuitry that produces one or more correction factors for such sensor deficiencies as temperature dependency, or nonlinearity effects, for example. These one or more correction factors are fed to the summer for summing with the uncompensated sensor output. Additionally, the output of the output circuitry (e.g., summing amplifier), is fed back to the compensation circuitry where it is compared to a compensated sensor output developed by the compensation circuitry. The difference between the compensated sensor signal developed in the compensation circuitry and the output signal fed back to the compensation circuitry is also provided to the summer for summing with the one or more correction factors and the uncompensated sensor output.