The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Feb. 05, 2002
Applicant:
Inventors:
Johann Karner, Feldkirch, AT;
Mauro Pedrazzini, Eschen, LI;
Christoph Hollenstein, Lutry, CH;
David Franz, Lausanne, CH;
Assignee:
Unaxis Balzers Aktiengesellschaft, Furstentum, LI;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H 1/24 ;
U.S. Cl.
CPC ...
H05H 1/24 ;
Abstract
Method for coating workpieces generates a beam of a plasma in an evacuated container. A region of highest plasma density is at the beam axis and workpieces having surfaces to be coated, are radially offset from, and extend along the axis with the surfaces facing the axis and being in the container. Fresh reactive gas is inlet into the container and consumed gas is removed from the container. Coating material is deposited upon the surfaces with a deposition rate of at least 400 nm/min and at a maximum temperature of the surfaces being 550° C.