The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Jun. 22, 2001
Stela Diamant Lazarovich, Palo Alto, CA (US);
Avner Rosenberg, Beit Shearim, IL;
Joseph Shiloh, Haifa, IL;
Joseph Statlender, Haifa, IL;
Elhanan Wurzberg, Kiriat Motzkin, IL;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present invention provides a DBD cell ( ) including ring shaped electrodes ( and ) that are positioned side-by-side on a dielectric tube ( ). An AC power supply ( ) is provided such that the cell and the power supply form a DBD treatment device ( ) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors ( ) and/or one or more gas addition ports ( ) can be included in a DBD cell ( ) of the present invention. Several DBD cells ( and ) of the present invention can be combined to form a DBD reactor ( ) of the present invention. AC power supplies ( and ) are utilized to energize the cells ( and ).