Method of detecting an integrated circuit in failure among integrated circuits, apparatus of doing the same, and recording medium storing program for doing the same

Abstract

There is provided a method of detecting an integrated circuit in failure among integrated circuits, based on spectrum which is a result of analyzing a frequency of a current running through an integrated circuit when a test signal is applied to the integrated circuit, comprising the steps of (a) assuming that all integrated circuits under test define a under-test integrated circuit set, and testing each one of the integrated circuits in the under-test integrated circuit set in a conventional manner, (b) removing integrated circuits having been judged to be in failure in the step (a), from the under-test integrated circuit set, (c) measuring spectrum of a current supplied from a power source into each one of the integrated circuits in the under-test integrated circuit set, (d) calculating both a mean value and standard deviation of the spectrum for the under-test integrated circuit set, (e) judging whether an integrated circuit is in failure or in no failure, based on both the mean value and the standard deviation of the spectrum, (f) removing integrated circuits having been judged to be in failure in the step (e), from the under-test integrated circuit set, and (g) judging the under-test integrated circuit set to be in no failure. The method makes it possible to find integrated circuits in failure without preparing data of an integrated circuit in no failure, as a reference.