The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2004
Filed:
Mar. 03, 2000
Mark A. Erickson, San Bruno, CA (US);
Cecilia Galarza, San Francisco, CA (US);
Dan Hernandez, Cupertino, CA (US);
Sunil C. Shah, Los Altos, CA (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A system and method is given for minimizing periodic disturbances in electronic systems. Given the input-output characteristics of the system, the present method identifies and cancels the periodic disturbance. The periodic disturbance parameters are identified through the use of a residual generator. The output of the residual generator is fed into an identifier that estimates disturbance parameters. The compensation filter combines the output of the identifier with a set of pre-computed parameters to form a cancellation signal. This signal is then added to the input of the plant to cancel the periodic disturbance.