The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2004
Filed:
Mar. 19, 2002
Sung-Hoan Kim, Suwon, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A method of forming a shallow trench isolation of a semiconductor device, includes providing a semiconductor substrate including field and active regions; forming a first insulating layer and a mask layer on the active region that expose the field region; etching the exposed field region to form a shallow trench; etching a portion of the mask layer to recess the mask layer a predetermined distance from an edge of the trench; forming a second insulating layer in the trench, the second insulating layer having a step higher than the active region; forming a liner layer as covering the mask layer and the second insulating layer; forming a third insulating layer as covering the liner layer and filling the trench; etching the mask, liner and third insulating layers to provide a planarized surface; removing the remaining mask layer; and removing the remaining first insulating layer.