The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 30, 2003

Filed:

Nov. 26, 2001
Applicant:
Inventors:

Dror Shemesh, Petah Tikva, IL;

Ariel Ben-Porath, Rehovot, IL;

Dubi Shachal, Rehovot, IL;

Alexey Stepanov, Rishon LeZion, IL;

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/726 ;
U.S. Cl.
CPC ...
H01J 3/726 ;
Abstract

A system and method for directing the object, such as a semiconductor die. The system includes a first images such as a scanning electron microscope, a stage for moving the object and a second imager and miller such as a focused ion beam generator. The object is images to locate a desired location in which the object is to be milled and a landmark that is utilized for directing the miller. The system can include additional steps of milling, analyzing and movement of the object.


Find Patent Forward Citations

Shemesh, Dror. (2003). System and method for directing a miller (U.S. Patent No. 6670610). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6670610

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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