The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Aug. 30, 2001
Helmut Gassel, München, DE;
Werner Kanert, Holzkirchen, DE;
Helmut Strack, München, DE;
Franz Hirler, Isen, DE;
Herbert Pairitsch, Klagenfurt, AT;
Infineon Technologies AG, Munich, DE;
Abstract
A method is provided for fabricating a body region of a first conduction type for a vertical MOS transistor configuration in a semiconductor body such that the body region has a reduced resistivity without a corresponding reduction in the breakdown voltage of the transistor. The method includes, inter alia: performing a first implantation of a doping material of a first conduction type into the semiconductor body such that an implantation maximum of the first implantation lies within the semiconductor body set back from the channel region; and performing a second implantation of a doping material of the first conduction type such that an implantation maximum of the second implantation lies within the semiconductor body below the implantation maximum of the first implantation. The dose of the second implantation is less than the dose of the first implantation.