The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
May. 16, 2001
Applicant:
Inventors:
Tsing-Tang Song, Ilan Hsien, TW;
Tsong-Shin Jean, Hsinchu Hsien, TW;
Weir-Torn Jiaang, Taipei, TW;
Chih-Shin Chuang, Chunghua, TW;
Han-Bin Cheng, Kaohsiung, TW;
Jui-Fa Chang, Hsinchu, TW;
Tzu-Yu Lin, Hsinchu Hsien, TW;
Assignee:
Industrial Technology Research Institute, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 ; C08F 3/008 ;
U.S. Cl.
CPC ...
G03F 7/004 ; C08F 3/008 ;
Abstract
The present invention relates to a silicon-containing copolymer which includes a maleic anhydride repeating unit, a norbornene repeating unit, and at least one silicon group-containing norbornene repeating unit. The silicon-containing copolymer is suitable for use as a top layer resist in a bilayer resist system.