The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Mar. 29, 2002
Applicant:
Inventors:
Assignee:
Idemitsu Kosan Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ; F27B 1/400 ; H01L 2/14763 ;
U.S. Cl.
CPC ...
C23C 1/434 ; F27B 1/400 ; H01L 2/14763 ;
Abstract
In a sputtering target comprising at least indium oxide and zinc oxide, the atomic ratio represented by In/(In+Zn) is set to a value within the range of 0.75 to 0.97, a hexagonal layered compound represented by In O (ZnO) wherein m is an integer of 2 to 20 is contained, and the crystal grain size of the hexagonal layered compound is set to a value of 5 &mgr;m or less.