The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Feb. 01, 2002
Munehisa Futamura, Shikishima-machi, JP;
Teruo Iwata, Asahi-machi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A resistance heating element for heating a wafer W is embedded within a ceramic heater that forms a susceptor for a semiconductor wafer W to be processed, and power lines from the resistance heating element extend out of the processing chamber A sheathing bellows that houses the power lines in an insulated state is interposed between the ceramic heater and a base plate of the processing chamber and an end piece of the sheathing bellows is connected by screws to the ceramic heater to provide a space therebetween. The screws are such as to permit the thermal expansion of the sheathing bellows This configuration makes it possible to make the temperature distribution in the surface of the semiconductor wafer uniform and thus improve the uniformity of film formation, and also prevent corrosion of components such as the power lines and terminals, and suppress the generation of particles.