The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2003
Filed:
Feb. 04, 2003
Motonari Tateno, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
An optical reticle substrate inspection apparatus is provided with a laser, a first acoustooptical element which scans a laser beam output from the laser, an a second acoustooptical element which generates a virtual image with a concave lens effect to the laser beam output from the first acoustooptical element. The optical reticle substrate inspection apparatus is further provided with a concave lens arranged on the output side of the laser beam of the second acoustooptical element and an optical system which images the virtual image on a reticle substrate being an object to be inspected. The concave lens magnifies the laser beam in a perpendicular direction to the scanning direction by the first acoustooptical element.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile