The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2003
Filed:
Jan. 28, 2000
Applicant:
Inventors:
Hirokazu Yashiro, Gifu-ken, JP;
Youichi Kuwayama, Gifu-ken, JP;
Assignee:
Ibiden Co., LTD, Gifu-ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 5/16 ; F04D 1/904 ;
U.S. Cl.
CPC ...
H02K 5/16 ; F04D 1/904 ;
Abstract
A compact turbo-molecular pump having a high depressurizing capability. A motor for rotating a rotor vane includes an air bearing. The air bearing has a rotary cylinder and a fixed surface surrounding the rotary cylinder. The material of the rotary cylinder has a coefficient of thermal expansion that is smaller than that of the material of the fixed surface. Thus, change in the dimensions of the rotary cylinder is smaller than that of the fixed surface even if the temperature of the air bearing rises during operation of the pump. Thus, the rotary cylinder avoids contact with the fixed surface.