The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2003
Filed:
Feb. 15, 2001
Koji Egashira, Tosu, JP;
Koji Tanaka, Tosu, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A liquid processing apparatus is provided to improve its processing efficiency, together with a liquid processing method. The apparatus is capable of both reduction in temperature-variation of a processing liquid at processing and shortening for temperature-recovery of the processing liquid. Further, the liquid processing apparatus can facilitate the establishment of respective designated temperatures for different processes and carry out different processes continuously and effectively. The apparatus includes an inner cylinder to accommodate semiconductor wafers W and a chemical supply unit to supply the semiconductor wafers W in an inner cylindrical chamber with a chemical liquid. The apparatus further includes a case heat exchanger arranged in an outer peripheral position of the inner cylinder and allowing a temperature-adjustment medium to flow and a medium supplier to supply the regulator with the temperature-adjustment medium.