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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6661152 B1

PDFFull Text
Expired
Date of Patent:
Dec. 09, 2003

Filed:

Oct. 04, 2002

Diamond substrate for surface acoustic wave device, and surface acoustic wave device

Applicant:
Inventors:

Keiji Ishibashi, Itami, JP;

Takahiro Imai, Itami, JP;

Tomoki Uemura, Itami, JP;

Daichi Kawaguchi, Itami, JP;

Hideaki Nakahata, Itami, JP;

Satoshi Fujii, Itami, JP;

Assignee:

Sumitomo Electric Industries, Ltd., Osaka, JP;

Attorney:

McDermott, Will & Emery

Primary Examiner:

Thomas M Dougherty

Int. Cl.
CPC ...
H03H 9/25 ;
U.S. Cl.
CPC ...
H03H 9/25 ;
Abstract

A diamond film is deposited in the thickness of 20 &mgr;m on a silicon wafer 0.8 mm thick by filament CVD. Here the hydrogen content of the diamond film is adjusted in the range of not less than 1% nor more than 5% in atomic percent. By mechanical polishing with a grinding wheel including diamond abrasives, the diamond film is smoothed so that the arithmetic mean roughness (Ra) of the surface thereof becomes not more than 20 nm.

Find Patent Forward Citations

Ishibashi, Keiji. (2003). Diamond substrate for surface acoustic wave device, and surface acoustic wave device (U.S. Patent No. 6661152). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6661152

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