The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 09, 2003

Filed:

Jun. 25, 2001
Applicant:
Inventors:

Yukihiro Sato, Chiba, JP;

Ryuichi Matsuzaki, Chiba, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G12B 2/120 ; G12B 2/122 ; G01N 3/700 ; H01J 3/700 ;
U.S. Cl.
CPC ...
G12B 2/120 ; G12B 2/122 ; G01N 3/700 ; H01J 3/700 ;
Abstract

A scanning probe instrument which can calibrate measured values and permits accurate length measurements regardless of a magnification factor. A scan signal generator produces a fine movement signal that is amplified or attenuated by an attenuator. Magnification data items for various magnification modes are stored in a dimensional relation storing portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal from the dimensional relation storing portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal at a magnification corresponding to the magnification data supplied via the magnification selector portion.


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