The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2003
Filed:
Oct. 25, 2001
ASM Technology Singapore PTE Ltd., Singapore, SG;
Abstract
The invention relates to a compartment having a space segregated from air outside the compartment and capable of housing a product apparatus for assembly of, for example, semiconductor devices and integrated circuit packages in a “clean” environment. The compartment includes panels to segregate the air inside the compartment from the surrounding environment. At the front of the compartment there is a top access panel and a bottom access panel to access a production apparatus (not shown) which is houseable or storable within a space for such apparatus defined within the compartment Where it is desired to place a plurality of similar compartments adjacent to one another to provide a production line, an opening can be included in one or both of the side panels for transfer of processed material, such as leadframes for assembling integrated circuit packages, from one production apparatus to another, housed in respective adjacent compartments Thus the or each compartment provides an individual clean space for carrying out a particular step of a production process. It is not therefore necessary to provide a single, massive, clean room.