The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
Oct. 10, 2001
Applicant:
Inventors:
Assignee:
ORC Manufacturing Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 1/720 ; H01J 6/120 ;
U.S. Cl.
CPC ...
H01J 1/720 ; H01J 6/120 ;
Abstract
To realize high irradiation efficiency and intensity stability for extending lifetime of the short-arc discharge lamp to be used for IC exposure apparatus or the like. For this end, mercury and rare gases are sealed in the inner space of the discharge tube The rare gases are a mixture of a relatively high molecular weight rare gas such as xenon, krypton, argon, etc. and 5%-40% by volume of a relatively low molecular weight rare gas such as helium, neon, etc. And pressure of the mixed rare gases is set to 2 atmospheric pressure or higher. The anode comprises the columnar body portion the tapered portion and the flat portion