The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2003
Filed:
Dec. 07, 2000
Applicant:
Inventors:
Darryl W. Peters, Stewartsville, NJ (US);
Roberto J. Rovito, Quakertown, PA (US);
Assignee:
Ashland Inc., Dublin, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 7/52 ; C11D 7/08 ;
U.S. Cl.
CPC ...
C11D 7/52 ; C11D 7/08 ;
Abstract
The invention relates to a method useful in removing etch residue from etcher equipment parts. The compositions used are aqueous, acidic compositions containing flouride and polar, organic solvents. The compositions are free of glycols and hydroxyl amine and have a low surface tension and viscosity.