The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2003
Filed:
Sep. 25, 2001
Applicant:
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 4/000 ; H01J 4/700 ; A61B 6/00 ; G01N 2/300 ; G21K 1/12 ;
U.S. Cl.
CPC ...
H01J 4/000 ; H01J 4/700 ; A61B 6/00 ; G01N 2/300 ; G21K 1/12 ;
Abstract
An electron spectroscopic analyzer using X-rays is provided. The electron spectroscopic analyzer includes an X-ray generator for generating X-rays, an optical system for detecting charged particles emitted from an object irradiated with the X-rays to analyze the object, a vacuum system whose inside is maintained at a low pressure near to vacuum pressure, the vacuum system being provided between the X-ray generator and the optical system, and a blocking unit provided between the X-ray generator and the optical system for preventing elements other than the X-rays emitted from the X-ray generator from flowing into the optical system.