The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
Sep. 20, 2001
Applicant:
Inventors:
Peter S. Chao, Aloha, OR (US);
Steve Rosenberg, Newberg, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
A61N 5/00 ; G21G 5/00 ; G01N 2/300 ; G21K 7/00 ;
U.S. Cl.
CPC ...
A61N 5/00 ; G21G 5/00 ; G01N 2/300 ; G21K 7/00 ;
Abstract
A beam processing system, such as a focused ion beam or an electron beam system, addressing an arbitrary series of points and receives data from the points in real time. The data can be used to image or to alter the processing, even within a single dwell period, thereby allowing closed feedback loop for processing. A delay calculator automatically determines the delay between instructing the system to move the beam and detecting a signal from the work piece surface so that the detector signal can be matched with the location on the work piece at which the signal was generated.