The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
Aug. 07, 2001
LPE SpA, Bollate, IT;
Abstract
A device for handling substrates, used in an epitaxial apparatus or reactor ( ) for chemical vapour deposition (CVD) onto the said substrates, comprises an internal robot ( ) provided with means ( ) for gripping and transporting substrates, which are in the form of semiconductor slices ( ), in order to transfer them from cassettes ( ) containing the semiconductor slices ( ) to be processed, the gripping and transportation means ( ) having precisely the task of transporting the slices ( ), which are present in a purging chamber ( ) and supplied from a cassette ( ) for storage of the said slices ( ), from the purging chamber ( ) into a reaction chamber ( ) of the epitaxial reactor ( ) and, more particularly, into seats ( ) formed on a flat disk-shaped susceptor ( ) which is present in the reaction chamber ( ) of the epitaxial reactor ( ) and vice versa, from the reaction chamber ( ) again passing through the purging chamber ( ), to the cassettes ( ).