The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 11, 2003

Filed:

Aug. 06, 2001
Applicant:
Inventors:

Taizo Nakamura, Kawasaki, JP;

Yoshio Saruki, Kawasaki, JP;

Tatsuya Narumi, Kawasaki, JP;

Yasushi Fukumoto, Kawasaki, JP;

Assignee:

Mitutoyo Corporation, Kawasaki, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 ;
U.S. Cl.
CPC ...
G01B 9/02 ;
Abstract

To provide a surface profile measurement apparatus capable of efficient measurement of the surface profile of an object. A diamond indenter ( ) is movably mounted. The tip end of the diamond indenter ( ) is irradiated by light, and the light reflected by the tip end ( ) is condensed through a lens ( ). The condensed light is observed by a photo sensor ( ) for measurement of the curvature radius of the tip end ( ). Meanwhile, the light reflected by the tip end ( ) and the light reflected by a reference body ( ) together cause an interference fringe. The interference fringe is observed by a CCD camera ( ) to measure the surface profile of tip end ( ).


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