The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Mar. 18, 2002
Johan C Compter, Eindhoven, NL;
Petrus C. M. Frissen, Beek, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus has a positioning system for positioning an object table. The positioning system includes a planar motor having a stator and a translator, one comprising a periodic magnet structure and the other comprising a plurality of coils. The phase relationship between the stator and translator is determined by energizing at least some of the coils with an oscillating signal sufficient to cause vibrations of the translator, measuring the vibrations, and determining the phase relationship between the translator and stator on the basis of the measured vibrations. Alternatively, the relationship between stator and translator may be determined by detecting distinct optical marks on the periodic magnet array.