The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Mar. 20, 2001
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
A method of sample preparation for transmission electron microscope analysis is disclosed. The method renders a typical TEM analysis on a sample having a photoresist layer practical. The method uses a conductive layer and a dielectric layer to protect a photoresist layer of the TEM sample from slicing damage and ion bombardment. The conductive layer and the dielectric layer can also isolate the photoresist layer from moisture and oxygen containing environments and prevent the photoresist layer from shrinking. Moreover, the entire TEM sample preparation process need not use any organic solvent or water to clean the sample.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile