The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Oct. 16, 2001
Applicant:
Inventor:
Shinji Yamaguchi, Ama-Gun, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/100 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H01L 2/100 ; C23C 1/600 ;
Abstract
A susceptor made of a ceramic material for placing and heating an object to be processed, on a placing face thereof in a semiconductor-producing apparatus, includes a surface layer having the placing face, and a supporting layer integrated with the surface layer. The volume resistivity of the surface layer is lower than that of the supporting layer.
Published as:
KR20020031290A; EP1202338A1; JP2002134590A; TW492066B; US2002112820A1; US6645304B2; JP4156788B2; EP1202338B1;