The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2003
Filed:
Jun. 19, 2001
Applicant:
Inventors:
Eiichi Shirakawa, Kikuchi-Gun, JP;
Toshichika Takei, Kikuchi-Gun, JP;
Assignee:
Tokyo Electron Limited, Tokyo-To, JP;
Primary Examiner:
Int. Cl.
CPC ...
F27D 5/00 ;
U.S. Cl.
CPC ...
F27D 5/00 ;
Abstract
A heating processing chamber has a plate for holding a wafer and a heater heating the plate portion. The plate portion is composed of a plurality of divided plates separated from each other, and thereby the plate is hard to break even through a drastic change in temperature, thus making it possible to increase the durability of the plate.