The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Sep. 04, 2001
Isamu Namose, Suwa, JP;
Toshikazu Sugiura, Suwa, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
The invention provides a method for measuring PFC components in a discharged gas with ease and good reproducibility, using an FT-IR. The method for measuring greenhouse gases using an infrared absorption spectrometer in accordance with the present invention includes the steps of selecting a process chemical material, selecting a measurement target chemical material corresponding to the process chemical material, designating expected concentration ranges for the process chemical material and the measurement target chemical material, selecting libraries for the respective expected concentration ranges for the process chemical material and the measurement target chemical material, and analyzing data obtained by a gas infrared absorption spectrometry based on the libraries.