The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Aug. 01, 2002
Kouji Kimura, Tokyo, JP;
Hirotami Koike, Tokyo, JP;
Kabushiki Kaisha Topcon, Tokyo, JP;
Abstract
A scanning electron microscope comprises: an electron beam source, an electron beam acceleration device for accelerating primary electrons generated by the electron beam source, a deflector for scanning and deflecting the accelerated primary electrons, a magnetic-electrostatic compound objective lens for focusing the scanned and deflected primary electrons onto a specimen mounted on a specimen support, a reflection electron detector for detecting reflection electrons generated from the specimen due to focusing and irradiating the primary electrons onto the specimen a secondary electron detector for detecting secondary electrons generated from the specimen due to focusing and irradiating the primary electrons onto the specimen and an image display device for displaying a specimen image from detection signals from each detector Moreover, there is provided an aperture around an axis for passing an electron beam and secondary electrons around the axis through the reflection electron detector This gives a: scanning electron microscope device which can separate and detect on an electron beam axis, reflection electrons and secondary electrons from a specimen, with a device of a simple construction.