The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Aug. 12, 2002
Applicant:
Inventors:
Peng Zhang, Quakertown, PA (US);
Danielle Megan King, Emmaus, PA (US);
Eugene Joseph Karwacki, Orefield, PA (US);
Leslie Cox Barber, Cave Creek, AZ (US);
Assignee:
Air Products and Chemicals, Inc., Allentown, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/30 ; G03F 7/38 ; C11D 1/700 ; B01D 1/200 ; B01F 1/700 ;
U.S. Cl.
CPC ...
G03F 7/30 ; G03F 7/38 ; C11D 1/700 ; B01D 1/200 ; B01F 1/700 ;
Abstract
Aqueous solutions comprising one or more acetylenic diol type surfactants are used to improve the wettability of a substrate surface by lowering the contact angle of the aqueous developer solution are enclosed herein. In one embodiment, the aqueous solution is used to prepare the surface of the substrate prior to development of the resist coating layer.