The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
May. 17, 2002
Ji-Hye Yi, Yongin-shi, KR;
Woo-Sik Kim, Suwon, KR;
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Abstract
A semiconductor memory device and fabricating method thereof, wherein the semiconductor memory device includes first and second conductive regions formed in parallel at predetermined regions of a semiconductor substrate, a storage node and a multiple tunnel junction layer pattern sequentially stacked on a channel region between the first and second conductive regions, a data line stacked on the multiple tunnel junction layer pattern, and a wordline covering both sidewalls of the storage node and of the multiple tunnel junction layer pattern, wherein both sidewalls of the storage node have undercut regions for increasing the overlapping area of the storage node and a wordline. The storage node is formed by alternately and repeatedly stacking first and second conductive layers having different etch rates, successively patterning the conductive layers to form a storage node pattern, and selectively and isotropically etching the first or second conductive layer of the storage node pattern.