The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Oct. 26, 2001
Kerry Bernstein, Underhill, VT (US);
Nicholas Theodore Schmidt, Colchester, VT (US);
Anthony K. Stamper, Williston, VT (US);
Stephen Arthur St. Onge, Colchester, VT (US);
Steven Howard Voldman, South Burlington, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of forming an integrated circuit interconnect level capacitor is disclosed. In an exemplary embodiment, the method includes depositing a first insulator layer over an interconnect level surface of a semiconductor substrate having active devices. First and second conductive lines are formed in the first insulator layer, and the first insulator layer is etched to form a trench therein between the first and second conductive lines. A first conductive layer is deposited over the first and second conductive lines the said trench. A second insulator layer is deposited over the first conductive layer, and a second conductive layer is deposited over the second insulator layer. Then, a third conductive line is formed and disposed in the trench, the third conductive line overlying the second conductive barrier layer.