The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2003
Filed:
Oct. 05, 2000
Kiyokazu Okamoto, Tsukuba, JP;
Ikumatsu Fujimoto, Tsukuba, JP;
Hirohisa Handa, Kawasaki, JP;
Naoki Mitsutani, Tsukaba, JP;
Mitutoyo Corporation, Kawasaki, JP;
Abstract
An interference optical system ( ) leads parallel beam to a pair of opposed test surface (M , M ). It then leads, from the test surfaces via different optical paths (C , C ), interference fringe images formed by radiation of the parallel beam to the test surfaces (M , M ), respectively. The interference optical system ( ) has a pair of opposite reference surfaces (S , S ) formed thereon and defined with a highly accuracy parallelism and distance. A measurement head ( ) is provided with these reference surfaces (S , S ), which are interposed between and oppose to the test surfaces (M , M ), respectively. Imaging devices ( ) take interference fringe images that are created through interference between a light reflected at each of the test surfaces (M , M ) and a light reflected at the corresponding reference surface (S , S ) opposing thereto.