The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2003
Filed:
Jun. 08, 2001
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/28 ; G01J 3/44 ; B24B 4/900 ;
U.S. Cl.
CPC ...
G01J 3/28 ; G01J 3/44 ; B24B 4/900 ;
Abstract
A machining apparatus ( ) comprises a material removing tool ( ) movably mounted for removing material from a workpiece ( ); means for illuminating ( ) a sample area upon a tool surface ( ) with excitation radiation; means for receiving ( ) sample light emitted from the sample area; a spectral analyzer ( ) for performing a spectral analysis of the sample light received; and means for determining ( ) the condition of the tool at the sample area from the spectral analysis of the sample light. The wear of the tool ( ) is determined as such a condition. Operation parameters of the machining apparatus ( ) are adjusted according to the determined wear. An example application is a wafer dicing tool.