The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2003
Filed:
Jul. 13, 2001
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
A method for automatically conducting a leak test for a vacuum system includes receiving a process status input representing the completion of a manufacturing cycle. On determining that the process status is in a complete state, the vacuum system isolation valve is closed. In one embodiment, the first pressure input is measured at the beginning of the leak test and compared to a second pressure input measured at the expiration of timer. If the difference between the first and second pressure measurements are greater than the configurable threshold pressure, then the vacuum system is determined to be leaky. In another embodiment, the vacuum system is determined to be leaky if at least one of a series of pressure measurements exceeds the threshold pressure value. In response to the determination of the leak, an interlock signal to disable the operation of the vacuum system is activated.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile