The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Jun. 07, 2001
Applicant:
Inventor:
Szetsen Steven Lee, Taipei, TW;
Assignee:
Winbond Electronics Corp., , TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/30 ;
U.S. Cl.
CPC ...
G01J 3/30 ;
Abstract
This invention provides a method for accurately measuring a gap distance between two electrodes. According to the method, a plasma space is formed between the electrodes, across which a DC voltage is coupled. The plasma space has a reactive gas that emits a spectrum of spectral lines. The spectrum is monitored to determine at least one line distance between the spectral lines. Finally, the gap distance can be deduced according to the line distance and a specific rule.
Quick Actions:
Lee, Szetsen. (2003). Spectroscopic method and related apparatus for measuring electrode gap distance (U.S. Patent No. 6628384). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6628384
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile