The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Aug. 10, 2001
Andreas C. Pfahnl, Goffstown, NH (US);
John J. Dunn, Jr., Peabody, MA (US);
Teradyne, Inc., Boston, MA (US);
Abstract
A semiconductor handling system has a temperature soak assembly to temperature soak a semiconductor structure (e.g., a panel), a test assembly to test the semiconductor structure, and a temperature desoak assembly to temperature desoak the semiconductor structure. The temperature desoak assembly includes (i) a heat sink that defines a surface which is configured to thermally couple with the semiconductor structure, (ii) a fluid guide coupled to the heat sink, and (iii) a fluid controller coupled to the fluid guide. The fluid controller provides a fluid (e.g., room temperature air) which the fluid guide directs over the heat sink to bring a temperature of the heat sink to a temperature of the fluid. This arrangement provides an effective low cost and low power means for temperature desoaking a semiconductor structure.