The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Feb. 21, 2001
Applicant:
Inventor:
Takao Inaba, Mitaka, JP;
Assignee:
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 2/118 ;
U.S. Cl.
CPC ...
B24B 2/118 ;
Abstract
A dresser of a wafer polishing apparatus according to this invention includes a grinding wheel head that is idly supported in such a manner as to be capable of moving up and down relative to a dresser main body , and an air bag interposed between the dresser main body and the grinding wheel head. The air pressure inside the air bag can be regulated so that the force pushing the grinding wheel head to the polishing cloth can be regulated. A washing tank for washing the grinding wheel head of the dresser is disposed adjacent to the platen , and a brush table having a brush implanted thereto is detachably provided to the bottom part of the washing tank