The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Feb. 16, 2001
Applicant:
Inventors:
Roland K Sevilla, Aurora, IL (US);
James A. Hicks, Naperville, IL (US);
Jeremy Jones, St. Charles, IL (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 4/912 ;
U.S. Cl.
CPC ...
B24B 4/912 ;
Abstract
The invention provides a polishing disk comprising (a) a body comprising a front surface, a back surface, and a peripheral surface, (b) a polishing surface, (c) an end-point detection port extending through the body from the front surface to the back surface, and (d) a drainage channel in fluid communication with the end-point detection port. The invention further provides a method of preparing such a polishing disk and a method of polishing a substrate with such a polishing disk.