The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Dec. 21, 2001
Toshiyuki Kaeriyama, Tsukuba-gun, JP;
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
To suppress undesired scattered light and leaking light so as to improve the optical function and reliability. In this DMD, as the address circuit of one cell, SRAM is formed monolithically on the principal surface of silicon substrate , and, on said SRAM , reflective digital optical switch or optical modulating element is formed monolithically as one cell made of three layers of a metal, such as aluminum, via oxide film . Each reflective optical modulating element has bias bus and yoke address electrodes as the first metal layer, torsional hinge , hinge supporting portions , yoke , and mirror address electrodes as the second metal layer, and mirror as the third metal layer. Optical absorptive and nonconductive film is formed to cover a portion or all of the first metal layer and to cover underlying film (insulating film) . In addition, said film is formed to bury hole formed on the surface of the third metal layer.