The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
May. 06, 2002
Applicant:
Inventor:
Sameer Parab, Milpitas, CA (US);
Assignee:
Elantec Semiconductor, Inc., Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/701 ; H01L 2/712 ; H01L 3/10392 ;
U.S. Cl.
CPC ...
H01L 2/701 ; H01L 2/712 ; H01L 3/10392 ;
Abstract
A silicon on insulator substrate is provided to include the following: a handle wafer; a layer of bonding material; a device wafer, the device wafer including at least one buried impurity region extending from the layer of bonding material upward into the device wafer; and an epitaxial silicon layer provided on a second surface of the device wafer. The silicon on insulator substrate with this configuration can be made with a minimal possible thickness.