The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Feb. 15, 2001
Applicant:
Inventors:
Michael P. Duane, Round Rock, TX (US);
David D. Wu, Austin, TX (US);
Massud Aminpur, Dresden, DE;
Scott D. Luning, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ;
U.S. Cl.
CPC ...
H01L 2/1336 ;
Abstract
A method is provided, the method including forming a gate dielectric above a surface of the substrate, forming the conductive gate structure above the gate dielectric, the conductive gate structure having an edge region, and forming a source/drain extension (SDE) adjacent the conductive gate structure. The method also includes forming a dopant-depleted-SDE region in the substrate under the edge region of the conductive gate structure.