The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2003
Filed:
Sep. 23, 2002
Applicant:
Inventor:
Ronald Jan Asjes, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/7205 ;
U.S. Cl.
CPC ...
H01J 3/7205 ;
Abstract
An electrostatic manipulating apparatus for handling a sample ( ) during and after removal from semiconductor wafers ( ) under a continuous vacuum, comprising a fork ( ) of at least two electrically conductive elements ( ) capable of exerting an electrostatic force on said sample. Preferably all electrically conductive elements are covered by a thin coating of insulating material for improved contact and release.
Asjes, Ronald. (2003). Electrostatic manipulating apparatus (U.S. Patent No. 6614029). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6614029
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile