The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2003
Filed:
Nov. 07, 2001
Applicant:
Inventors:
Christopher Hans Lansford, Austin, TX (US);
Jeremy Sam Lansford, Austin, TX (US);
Assignee:
Advanced Micro Devices, INC, Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract
A method is provided, the method comprising planarizing a dielectric layer disposed above a structure layer, exciting surface plasmons in a conductive film disposed in the dielectric layer and detecting photons reflected from the conductive film to determine a change in a surface plasmon resonant angle. The method also comprises determining a thickness of the dielectric layer from the change in the surface plasmon resonant angle.