The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2003
Filed:
Dec. 28, 2000
Applicant:
Inventors:
James M. Poulin, Derry, NH (US);
Santhi E. Mathew, Londonderry, NH (US);
Leonid Mindlin, South Natick, MA (US);
Claudia J. Quigley, Lexington, MA (US);
Stephen D. Blankenship, Melrose, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 1/904 ;
U.S. Cl.
CPC ...
G01L 1/904 ;
Abstract
A capacitive pressure transducer including a heater shell, a capacitive pressure sensor, an electronics assembly and a thermal barrier is presented. The sensor and the electronics assembly are disposed in the heater shell. The thermal barrier is also disposed in the heater shell and is disposed between the sensor and electronics assembly.