The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 26, 2003
Filed:
Jul. 10, 2000
Applicant:
Inventor:
David B. Chung, Cupertino, CA (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 5/18 ; G02B 2/606 ; G02B 2/608 ;
U.S. Cl.
CPC ...
G02B 5/18 ; G02B 2/606 ; G02B 2/608 ;
Abstract
A micromechanical reflection phase grating may be formed of spring-like ribbon reflectors that are secured to a transparent cover positioned over a substrate such as a silicon substrate. The ribbon reflectors are formed independently of the silicon substrate. If a defect occurs in the phase grating and particularly the ribbon reflectors, the top plate assembly can be reworked or discarded without sacrificing the relatively expensive silicon substrate.