The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 26, 2003

Filed:

Apr. 18, 2001
Applicant:
Inventors:

Masato Akiba, Ibaraki-ken, JP;

Kazuyuki Nakamura, Ibaraki-ken, JP;

Akira Ichida, Toyama-ken, JP;

Takehiko Hayashi, Toyama-ken, JP;

Assignee:

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 8/00 ; G21B 1/00 ;
U.S. Cl.
CPC ...
C23C 8/00 ; G21B 1/00 ;
Abstract

In a plasma facing member exposed to a plasma beam of nuclear fusion reactors or the like, such as an electron beam, a tungsten layer is formed by the use of a CVD method and has a thickness of 500 micron meters or more. The tungsten layer may be overlaid on a substrate of molybdenum or tungsten and comprises included gases reduced to 2 ppm or less and impurities reduced to 2 ppm or less. The tungsten layer is specified by either a fine equi-axed grain structure or a columnar grain structure. Alternatively, the material of the substrate may be, for example, Cu alloy, stainless steel, Nb alloy, or V alloy.

Published as:
JPH07228976A; JP2844304B2; US6261648B1; US2002015466A1; US6610375B2;

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