The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2003
Filed:
Aug. 02, 2001
Applicant:
Inventor:
Shu-Ya Hsu, Yun-Lin, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
Abstract
The invention utilizes introductions of oxygen and hydroxyl to perform an in situ steam generated (ISSG) process to anneal and reoxidize a conventional sidewall oxide layer in a shallow trench isolation. The ISSG annealing process renders the conventional sidewall oxide layer much less stress. The electrical property of the active regions and the isolation quality between the active regions can be assured.